Hu X, Wu X, Wang Z, Chen W, Zhang W (2011) Model design of piezoelectric micromachined modal gyroscope. Gronz O, Hiller PH, Wirtz S, Becker K, Iserloh T, Seeger M, Ries JB (2016) Smartstones: a small 9-axis sensor implanted in stones to track their movements. In: Proceedings of IEEE international symposium on the industrial electronics Garcia-Quinchía A, Martin E, Ferrer C (2009) A system-on-chip (SOC) platform to integrated inertial navigation systems & GPS. Int J Appl Ceram Technol 12:E208–E214įilippeschi A, Schmitz N, Miezal M, Bleser G, Ruffaldi E, Stricker D (2017) Survey of motion tracking methods based on inertial sensors: a focus on upper limb human motion. Sensors 17(11):2505Ĭheng Y, Zhang W, Tang J, Liu W, Wang Y, Chen W (2015) Research on a micro piezoelectric gyroscope with concentrated rocking-mass. Int J Signal Process Syst 1(2):256–262Ĭhang CY, Chen TL (2017) Design, fabrication, and modeling of a novel dual-axis control input PZT gyroscope. The measured Q of the fabricated piezoelectric gyroscope was maintained stably at 400–500 at normal pressure.Īhmad N, Ghazilla RAR, Khairi NM, Kasi V (2013) Reviews on various inertial measurement unit (IMU) sensor applications. The response under angular rate was 1°/s in the x- and y-directions, and the measurement sensitivity was 17.2 µV/(°/s). A velocity demodulation method was implemented for the sensor to demodulate the outputs of angular velocities this is more beneficial for decoupled vibrating gyroscopes compared to displacement demodulation. The driving circuit maintained stable oscillation throughout operation of the gyroscope because the automatic gain controller was added to the self-oscillation loop. The stop time was improved from 15 to 3 ms using an inverse driving module. Self-oscillation works by detecting a displacement signal differentially, adjusting it by a phase of π/2, and sending it to the oscillation signal generator. The self-oscillation function was tested using a charging amplifier and phase shifter. We developed driving circuit modules with self-oscillation and an automatic gain controller and a synchronous detection circuit for demodulation of the sensing signals. We developed a driving and sensing system for a multi-axial inertial sensor that operates at atmospheric pressure using vibrating piezoelectric gyroscope sensors.
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